Conventional compensation of position errors of machine tools relies only on measured values. Due to this principle it is not always possible to compensate the errors in time, especially dynamic ones. Moreover, the relevant ...

Precision machining is becoming more and more important with the increasing demands on surface quality for various components. This applies, for example, to mirror components in micro-optics or cooling components in ...

In this paper, a new planar drive system for the use in small machine tools is introduced. It is based on an innovative fluid dynamic drive principle, which generates thrust forces by the deflection of fluid jets on flow ...